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2013 (Vol. 6, Issue: 23)
Article Information:

Analysis and Experiment of MEMS Based Microdroplet Ejector by a Piezoelectric Stack Actuator in Microfluidic Application

K. Ganesan and V. Palanisamy
Corresponding Author:  K. Ganesan 

Key words:  Anodic bonding, eutectic bonding, MEMS, pyrex micro machining, SOI, ,
Vol. 6 , (23): 4344-4349
Submitted Accepted Published
October 30, 2012 June 18, 2013 December 15, 2013
Abstract:

Micro Electro Mechanical Systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and micro fluidic devices. Green interactions between liquids and micro scale structures can lead to volatile performance of MEMS in liquid environments. In this study, the design and fabrication of a multi-material high-performance micro pump is presented. The micro pumps are fabricated using MEMS fabrication techniques, comprised of silicon and Pyrex micromachining and bonding. Manufacturing steps such as three small bulk cylindrical piezoelectric material elements that are integrated with micro-fabricated Silicon-on-Insulator (SOI) and glass micro machined substrates using eutectic bonding and anodic bonding processes were successfully realized and provide a robust and scalable production technique for the micro pump. Exceptional flow rates of 0.1 mL/min with 1 W power consumption based on piezoelectric stack actuation achieved by appropriate design optimization.
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  Cite this Reference:
K. Ganesan and V. Palanisamy, 2013. Analysis and Experiment of MEMS Based Microdroplet Ejector by a Piezoelectric Stack Actuator in Microfluidic Application.  Research Journal of Applied Sciences, Engineering and Technology, 6(23): 4344-4349.
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ISSN (Online):  2040-7467
ISSN (Print):   2040-7459
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