Home           Contact us           FAQs           
 
   Journal Page   |   Aims & Scope   |   Author Guideline   |   Editorial Board   |   Search
    Abstract
2013 (Vol. 5, Issue: 03)
Article Information:

Design and Analysis of Silicon Resonant Accelerometer

Jing Li, Shangchun Fan and Zhanshe Guo
Corresponding Author:  Jing Li 

Key words:  Model analysis, silicon resonant accelerometer, structure optimization, , , ,
Vol. 5 , (03): 970-974
Submitted Accepted Published
June 22, 2012 July 23, 2012 January 21, 2013
Abstract:

In this study, we present an approach for micromechanical resonant accelerometer design, structural optimization and testing method of a kind of resonant accelerometer which is excited by the electrostatic force and detected by the change of capacitance. The structure parameters’ influence on capability parameters are analyzed by MATLAB and the mechanical and model analysis of structure are carried out by ANSYS, also, we optimized the structure parameters. Simulating results validates the design thought.
Abstract PDF HTML
  Cite this Reference:
Jing Li, Shangchun Fan and Zhanshe Guo, 2013. Design and Analysis of Silicon Resonant Accelerometer.  Research Journal of Applied Sciences, Engineering and Technology, 5(03): 970-974.
    Advertise with us
 
ISSN (Online):  2040-7467
ISSN (Print):   2040-7459
Submit Manuscript
   Current Information
   Sales & Services
   Contact Information
  Executive Managing Editor
  Email: admin@maxwellsci.com
  Publishing Editor
  Email: support@maxwellsci.com
  Account Manager
  Email: faisalm@maxwellsci.com
  Journal Editor
  Email: admin@maxwellsci.com
  Press Department
  Email: press@maxwellsci.com
Home  |  Contact us  |  About us  |  Privacy Policy
Copyright © 2009. MAXWELL Science Publication, a division of MAXWELLl Scientific Organization. All rights reserved